KMID : 0385520020150020108
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Analytical Science & Technology 2002 Volume.15 No. 2 p.108 ~ p.114
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Study for Conductive and Non-conductive Multi-layers Depth Profiling Analysis of Radio Frequency Gas-jet Boosted Glow Discharge Spectrometry
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Á¶¿øº¸/Cho WB
½ºÆ©¾îµå º¸µç/Á¤Á¾ÇÊ/°¿ø±Ô/±è±Ôȯ/±èÈ¿Áø/Borden S/Jeong JP/Kang WK/Kim KW/Kim HJ
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Abstract
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KEYWORD
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